Inventor · disambiguated record
Franciscus Adrianus Gerardus Klaassen
Also filed as: KLAASSEN FRANCISCUS A G · KLAASSEN FRANCISCUS ADRIANUS G · KLAASSEN FRANCISCUS ADRIANUS GERARDUS
5 granted patents·77 citations·filing 2000–2006
77Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV5
Top patents by PatentIndex Score
5 records- 0190US6392738B1Lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted May 21, 2002·59 cites·14 claims
- 0288US7352149B2Method for controlling the position of a movable object, a positioning system, and a lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Apr 1, 2008·12 cites·18 claims
- 0375US7420299B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 2, 2008·4 cites·19 claims
- 0464US7675201B2Lithographic apparatus with planar motor driven supportASML NETHERLANDS BV·Filed 2006·Granted Mar 9, 2010·2 cites·21 claims
- 0546US7592760B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 22, 2009·0 cites·19 claims
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