Inventor
OOHASHI KAORU
JP19 patents
⚠️ This page may combine multiple inventors who share the name “OOHASHI KAORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUSD553104SOct 16, 2007
Absorption board for an electric chuck used in semiconductor manufacture
TOKYO ELECTRON LTD598 citations98
US7718007B2May 18, 2010
Substrate supporting member and substrate processing apparatus
TOKYO ELECTRON LTD23 citations92
US8904957B2Dec 9, 2014
Plasma processor and plasma processing method
TOKYO ELECTRON LTD12 citations91
US7815740B2Oct 19, 2010
Substrate mounting table, substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD19 citations84
US9728381B2Aug 8, 2017
Plasma processor and plasma processing method
TOKYO ELECTRON LTD4 citations83
US9437402B2Sep 6, 2016
Plasma processor and plasma processing method
TOKYO ELECTRON LTD11 citations83
US10629464B2Apr 21, 2020
Plasma processing apparatus and heater temperature control method
TOKYO ELECTRON LTD2 citations73
US10026631B2Jul 17, 2018
Plasma processing apparatus and heater temperature control method
TOKYO ELECTRON LTD4 citations73
US9412635B2Aug 9, 2016
Electrostatic chuck device
TOKYO ELECTRON LTD4 citations72
US11569073B2Jan 31, 2023
Assembly provided with coolant flow channel, method of controlling assembly provided with coolant flow channel, and substrate processing apparatus
TOKYO ELECTRON LTD0 citations52
US8869376B2Oct 28, 2014
Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism
TOKYO ELECTRON LTD0 citations52
NIPPON DENSO CO
4 patentsUS4618156AOct 21, 1986
Vehicle height control system
NIPPON DENSO CO26 citations92
US4593920AJun 10, 1986
Vehicle height control system
NIPPON DENSO CO38 citations90
US4591185AMay 27, 1986
Vehicle height control system
NIPPON DENSO CO8 citations72
US4611815ASep 16, 1986
Vehicle height control system
NIPPON DENSO CO18 citations71