USD553104SExpiredUtility

Absorption board for an electric chuck used in semiconductor manufacture

Assignee: TOKYO ELECTRON LTDPriority: Apr 21, 2004Filed: Oct 19, 2004Granted: Oct 16, 2007

Est. expiryApr 21, 2024(expired)· nominal 20-yr term from priority

PatentIndex Score

598

Cited by

References

Claims

exact text as granted — not AI-modified

CLAIM 
     
       We claim the ornamental design for an absorption board for an electric chuck used in semiconductor manufacture, as shown.

Join the waitlist — get patent alerts

Track USD553104S — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.