Inventor
SHIM KYUHA
US7 patents
⚠️ This page may combine multiple inventors who share the name “SHIM KYUHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS11430877B2Aug 30, 2022
Ion implantation to reduce nanosheet gate length variation
APPLIED MATERIALS INC2 citations71
US11955533B2Apr 9, 2024
Ion implantation to reduce nanosheet gate length variation
APPLIED MATERIALS INC0 citations60
US12581884B2Mar 17, 2026
Methods for oxidizing a silicon hardmask using ion implant
APPLIED MATERIALS INC0 citations59
US12217974B2Feb 4, 2025
Localized stress modulation by implant to back of wafer
APPLIED MATERIALS INC0 citations59
US11756796B2Sep 12, 2023
Techniques for improved low dielectric constant film processing
APPLIED MATERIALS INC0 citations59
US11551904B2Jan 10, 2023
System and technique for profile modulation using high tilt angles
APPLIED MATERIALS INC0 citations56