Inventor · disambiguated record
Michael Feltsman
Also filed as: FELTSMAN MICHAEL
5 granted patents·75 citations·filing 2002–2004
82Inventor score
Files withAPPLIED MATERIALS INC5
Top patents by PatentIndex Score
5 records- 0182US6776848B2Motorized chamber lidAPPLIED MATERIALS INC·Filed 2002·Granted Aug 17, 2004·21 cites·21 claims
- 0280US6669829B2Shutter disk and blade alignment sensorAPPLIED MATERIALS INC·Filed 2002·Granted Dec 30, 2003·17 cites·16 claims
- 0376US7008517B2Shutter disk and blade for physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2003·Granted Mar 7, 2006·17 cites·35 claims
- 0475US6827825B2Method for detecting the position of a shutter disk in a physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2003·Granted Dec 7, 2004·12 cites·12 claims
- 0560US7371285B2Motorized chamber lidAPPLIED MATERIALS INC·Filed 2004·Granted May 13, 2008·8 cites·12 claims
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