Inventor · disambiguated record
Tatsuro Ohkawa
Also filed as: OHKAWA TATSURO
9 granted patents·148 citations·filing 1996–1999
89Inventor score
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9 records- 0184US6242751B1Charged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1999·Granted Jun 5, 2001·33 cites·62 claims
- 0279US5757015ACharged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1996·Granted May 26, 1998·25 cites·22 claims
- 0375US5969365ACharged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1997·Granted Oct 19, 1999·20 cites·18 claims
- 0463US5892237ACharged particle beam exposure method and apparatusFUJITSU LTD·Filed 1997·Granted Apr 6, 1999·28 cites·19 claims
- 0554US6407398B1Electron beam exposure apparatus and exposure methodADVANTEST CORP·Filed 1999·Granted Jun 18, 2002·19 cites·12 claims
- 0648US6414325B1Charged particle beam exposure apparatus and exposure method capable of highly accurate exposure in the presence of partial unevenness on the surface of exposed specimenADVANTEST CORP·Filed 1999·Granted Jul 2, 2002·8 cites·14 claims
- 0741US5708276AElectron-beam exposure device and a method of detecting a mark position for the deviceFUJITSU LTD·Filed 1996·Granted Jan 13, 1998·6 cites·34 claims
- 0837US5966200ACharged particle beam exposure apparatusFUJITSU LTD·Filed 1997·Granted Oct 12, 1999·7 cites·4 claims
- 0932US5945683AElectron beam exposure deviceFUJITSU LTD·Filed 1997·Granted Aug 31, 1999·2 cites·7 claims
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