Inventor
IIDA NARUAKI
JP46 patents
⚠️ This page may combine multiple inventors who share the name “IIDA NARUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
38 patentsUS5826129AOct 20, 1998
Substrate processing system
TOKYO ELECTRON LTD552 citations99
US6054181AApr 25, 2000
Method of substrate processing to form a film on multiple target objects
TOKYO ELECTRON LTD106 citations98
US5565034AOct 15, 1996
Apparatus for processing substrates having a film formed on a surface of the substrate
TOKYO ELECTRON LTD216 citations98
US5460478AOct 24, 1995
Method for processing wafer-shaped substrates
TOKYO ELECTRON LTD123 citations98
US5664254ASep 2, 1997
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD129 citations97
US6672779B2Jan 6, 2004
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD51 citations96
US6471422B2Oct 29, 2002
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD63 citations96
US6402401B1Jun 11, 2002
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD49 citations96
US5364222ANov 15, 1994
Apparatus for processing wafer-shaped substrates
TOKYO ELECTRON LTD107 citations96
US5725664AMar 10, 1998
Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections
TOKYO ELECTRON LTD87 citations95
USD674761SJan 22, 2013
Wafer holding member
TOKYO ELECTRON LTD17 citations92
US6915183B2Jul 5, 2005
Substrate processing apparatus and method of aligning substrate carrier apparatus
TOKYO ELECTRON LTD21 citations92
US5928390AJul 27, 1999
Vertical processing apparatus
TOKYO ELECTRON LTD45 citations92
USRE37470EDec 18, 2001
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD22 citations91
US6206974B1Mar 27, 2001
Substrate processing system, interface apparatus, and substrate transportation method
TOKYO ELECTRON LTD22 citations86
US10042356B2Aug 7, 2018
Substrate processing apparatus, method for correcting positional displacement, and storage medium
TOKYO ELECTRON LTD7 citations84
US7993081B2Aug 9, 2011
Substrate carrying device, substrate carrying method and computer-readable storage medium
TOKYO ELECTRON LTD8 citations84
US6168669B1Jan 2, 2001
Substrate holding apparatus and substrate process system
TOKYO ELECTRON LTD18 citations84
US11705359B2Jul 18, 2023
Substrate transfer mechanism and substrate transferring method
TOKYO ELECTRON LTD5 citations83
US6643564B2Nov 4, 2003
Method of determining retreat permission position of carrier arm and teaching device thereof
TOKYO ELECTRON LTD13 citations82
US6050389AApr 18, 2000
Carrier apparatus with more than one carrier belts and processing apparatus therewith
TOKYO ELECTRON LTD16 citations82
US10795265B2Oct 6, 2020
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD2 citations72
US9818654B2Nov 14, 2017
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD6 citations72
US6332751B1Dec 25, 2001
Transfer device centering method and substrate processing apparatus
TOKYO ELECTRON LTD11 citations72
US11978655B2May 7, 2024
Substrate transfer mechanism and substrate transferring method
TOKYO ELECTRON LTD2 citations71
US11752515B2Sep 12, 2023
Coating apparatus and coating method
TOKYO ELECTRON LTD4 citations68
US7758340B2Jul 20, 2010
Heating device and heating method
TOKYO ELECTRON LTD4 citations63
US9082800B2Jul 14, 2015
Substrate treatment system, substrate transfer method and non-transitory computer-readable storage medium
TOKYO ELECTRON LTD2 citations61
US8707805B2Apr 29, 2014
Transfer apparatus and transfer method
TOKYO ELECTRON LTD2 citations61
US12368069B2Jul 22, 2025
Substrate transfer device including housing provided with fan
TOKYO ELECTRON LTD0 citations60
US12151255B2Nov 26, 2024
Coating apparatus and coating method
TOKYO ELECTRON LTD0 citations56
US7470098B2Dec 30, 2008
Detecting apparatus and detecting method
TOKYO ELECTRON LTD1 citations52
US6709545B2Mar 23, 2004
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD1 citations52
US9299599B2Mar 29, 2016
Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position
TOKYO ELECTRON LTD1 citations51
US12391472B2Aug 19, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US12557591B2Feb 17, 2026
Linearly moving mechanism and method of suppressing particle scattering
TOKYO ELECTRON LTD0 citations47
US12381102B2Aug 5, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations47
US9214370B2Dec 15, 2015
Substrate transfer device, substrate transfer method, and storage medium
TOKYO ELECTRON LTD0 citations41
IIDA NARUAKI
3 patentsUSD695240SDec 10, 2013
Arm for wafer transportation for manufacturing semiconductor
IIDA NARUAKI483 citations98
USD701498SMar 25, 2014
Arm for wafer transportation for manufacturing semiconductor
IIDA NARUAKI23 citations92
US8292549B2Oct 23, 2012
Substrate carrying device, substrate carrying method and computer-readable storage medium
IIDA NARUAKI8 citations84