USD674761SActiveUtility

Wafer holding member

72
Assignee: TOKYO ELECTRON LTDPriority: Oct 20, 2011Filed: Mar 2, 2012Granted: Jan 22, 2013
Est. expiryOct 20, 2031(~5.3 yrs left)· nominal 20-yr term from priority
Inventors:Naruaki IidaHideki Kajiwara
72
PatentIndex Score
17
Cited by
17
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for wafer holding member, as shown and described.

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