Inventor · disambiguated record
Naruaki Iida
Also filed as: IIDA NARUAKI
45 granted patents·2 pending applications·2,384 citations·filing 1993–2025
98Inventor score
Top patents by PatentIndex Score
47 records- 0198USD695240SArm for wafer transportation for manufacturing semiconductorIIDA NARUAKI·Filed 2012·Granted Dec 10, 2013·483 cites·1 claims
- 0298US5826129ASubstrate processing systemTOKYO ELECTRON LTD·Filed 1995·Granted Oct 20, 1998·552 cites·23 claims
- 0396US8528889B2Device and method for supporting a substrateNAKANO SEIJI·Filed 2010·Granted Sep 10, 2013·142 cites·9 claims
- 0495US5565034AApparatus for processing substrates having a film formed on a surface of the substrateTOKYO ELECTRON LTD·Filed 1994·Granted Oct 15, 1996·216 cites·38 claims
- 0594US11705359B2Substrate transfer mechanism and substrate transferring methodTOKYO ELECTRON LTD·Filed 2022·Granted Jul 18, 2023·5 cites·8 claims
- 0694US6471422B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2002·Granted Oct 29, 2002·63 cites·13 claims
- 0793US11978655B2Substrate transfer mechanism and substrate transferring methodTOKYO ELECTRON LTD·Filed 2023·Granted May 7, 2024·2 cites·8 claims
- 0893US6672779B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2002·Granted Jan 6, 2004·51 cites·22 claims
- 0992US6402401B1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2000·Granted Jun 11, 2002·49 cites·66 claims
- 1092US5460478AMethod for processing wafer-shaped substratesTOKYO ELECTRON LTD·Filed 1995·Granted Oct 24, 1995·123 cites·14 claims
- 1191US11752515B2Coating apparatus and coating methodTOKYO ELECTRON LTD·Filed 2020·Granted Sep 12, 2023·4 cites·14 claims
- 1291US6054181AMethod of substrate processing to form a film on multiple target objectsTOKYO ELECTRON LTD·Filed 1996·Granted Apr 25, 2000·106 cites·18 claims
- 1391US5664254ASubstrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 1996·Granted Sep 2, 1997·129 cites·16 claims
- 1490US10042356B2Substrate processing apparatus, method for correcting positional displacement, and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Aug 7, 2018·7 cites·13 claims
- 1589US5725664ASemiconductor wafer processing apparatus including localized humidification between coating and heat treatment sectionsTOKYO ELECTRON LTD·Filed 1996·Granted Mar 10, 1998·87 cites·23 claims
- 1689US5364222AApparatus for processing wafer-shaped substratesTOKYO ELECTRON LTD·Filed 1993·Granted Nov 15, 1994·107 cites·21 claims
- 1788US9818654B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2016·Granted Nov 14, 2017·6 cites·12 claims
- 1888US8292549B2Substrate carrying device, substrate carrying method and computer-readable storage mediumIIDA NARUAKI·Filed 2011·Granted Oct 23, 2012·8 cites·5 claims
- 1984US7993081B2Substrate carrying device, substrate carrying method and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2006·Granted Aug 9, 2011·8 cites·3 claims
- 2079US12368069B2Substrate transfer device including housing provided with fanTOKYO ELECTRON LTD·Filed 2024·Granted Jul 22, 2025·0 cites·4 claims
- 2179US8985929B2Substrate processing apparatus, substrate processing method and storage mediumENOKIDA SUGURU·Filed 2012·Granted Mar 24, 2015·7 cites·7 claims
- 2278US10795265B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2019·Granted Oct 6, 2020·2 cites·11 claims
- 2377USD701498SArm for wafer transportation for manufacturing semiconductorIIDA NARUAKI·Filed 2012·Granted Mar 25, 2014·23 cites·1 claims
- 2477US6915183B2Substrate processing apparatus and method of aligning substrate carrier apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Jul 5, 2005·21 cites·11 claims
- 2574US5928390AVertical processing apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Jul 27, 1999·45 cites·49 claims
- 2673US12151255B2Coating apparatus and coating methodTOKYO ELECTRON LTD·Filed 2023·Granted Nov 26, 2024·0 cites·14 claims
- 2773US7758340B2Heating device and heating methodTOKYO ELECTRON LTD·Filed 2006·Granted Jul 20, 2010·4 cites·19 claims
- 2873US2025349586A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 2973US2025276848A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 3072USD674761SWafer holding memberTOKYO ELECTRON LTD·Filed 2012·Granted Jan 22, 2013·17 cites·1 claims
- 3171US8441618B2Substrate transfer method and apparatusNAKAHARADA MASAHIRO·Filed 2010·Granted May 14, 2013·4 cites·8 claims
- 3269US8720873B2Substrate holding deviceHAYASHI SHINICHI·Filed 2012·Granted May 13, 2014·2 cites·8 claims
- 3369US8707805B2Transfer apparatus and transfer methodTOKYO ELECTRON LTD·Filed 2012·Granted Apr 29, 2014·2 cites·11 claims
- 3469US6332751B1Transfer device centering method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Dec 25, 2001·11 cites·16 claims
- 3568US9082800B2Substrate treatment system, substrate transfer method and non-transitory computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2012·Granted Jul 14, 2015·2 cites·20 claims
- 3667US12391472B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Aug 19, 2025·0 cites·20 claims
- 3767US6643564B2Method of determining retreat permission position of carrier arm and teaching device thereofTOKYO ELECTRON LTD·Filed 2003·Granted Nov 4, 2003·13 cites·8 claims
- 3866US9299599B2Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer positionTOKYO ELECTRON LTD·Filed 2014·Granted Mar 29, 2016·1 cites·4 claims
- 3965US8755935B2Substrate holder positioning method and substrate processing systemDOUKI YUICHI·Filed 2012·Granted Jun 17, 2014·2 cites·12 claims
- 4062US12381102B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Aug 5, 2025·0 cites·10 claims
- 4162US7470098B2Detecting apparatus and detecting methodTOKYO ELECTRON LTD·Filed 2007·Granted Dec 30, 2008·1 cites·9 claims
- 4259USRE37470ESubstrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 1999·Granted Dec 18, 2001·22 cites·16 claims
- 4354US6168669B1Substrate holding apparatus and substrate process systemTOKYO ELECTRON LTD·Filed 1999·Granted Jan 2, 2001·18 cites·13 claims
- 4451US6206974B1Substrate processing system, interface apparatus, and substrate transportation methodTOKYO ELECTRON LTD·Filed 1998·Granted Mar 27, 2001·22 cites·40 claims
- 4549US6050389ACarrier apparatus with more than one carrier belts and processing apparatus therewithTOKYO ELECTRON LTD·Filed 1998·Granted Apr 18, 2000·16 cites·21 claims
- 4647US6709545B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2002·Granted Mar 23, 2004·1 cites·23 claims
- 4743US9214370B2Substrate transfer device, substrate transfer method, and storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Dec 15, 2015·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →