Inventor · disambiguated record

Nicholaas A. A. J. Van Asten

Also filed as: VAN ASTEN NICHOLAAS A A J

1 granted patent·5 citations·filing 2004–2004

32Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

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1 record

0163US7202938B2Off-axis levelling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Apr 10, 2007·5 cites·15 claims

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Nicholaas A. A. J. Van Asten — Patent Inventor | PatentIndex