Inventor · disambiguated record
Marcus Boonman
Also filed as: BOONMAN MARCUS E J · BOONMAN MARCUS EMILE JOANNES
10 granted patents·1 pending application·368 citations·filing 2000–2007
91Inventor score
Files withASML NETHERLANDS BV11
Top patents by PatentIndex Score
11 records- 0196US6674510B1Off-axis levelling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted Jan 6, 2004·192 cites·95 claims
- 0293US6741331B2Lithographic apparatus with improved exposure area focus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted May 25, 2004·72 cites·20 claims
- 0388US7113256B2Lithographic apparatus and device manufacturing method with feed-forward focus controlASML NETHERLANDS BV·Filed 2004·Granted Sep 26, 2006·35 cites·19 claims
- 0484US7019815B2Off-axis leveling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Mar 28, 2006·19 cites·11 claims
- 0580US7564536B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jul 21, 2009·7 cites·47 claims
- 0678US6924884B2Off-axis leveling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2003·Granted Aug 2, 2005·23 cites·60 claims
- 0767US7649635B2Method for determining a map, device manufacturing method, and lithographic apparatusASML NETHERLANDS BV·Filed 2007·Granted Jan 19, 2010·2 cites·3 claims
- 0863US7202938B2Off-axis levelling in lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Apr 10, 2007·5 cites·15 claims
- 0962US7113257B2Assembly comprising a sensor for determining at least one of tilt and height of a substrate, a method therefor and a lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Sep 26, 2006·9 cites·30 claims
- 1056US7292351B2Method for determining a map, device manufacturing method, and lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Nov 6, 2007·4 cites·34 claims
- 1138US2005134865A1Method for determining a map, device manufacturing method, and lithographic apparatusASML NETHERLANDS BV·Filed 2003·Application pending·0 cites
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