Inventor · disambiguated record
Marc Léon Van Der Gaag
Also filed as: VAN DER GAAG MARC LÉON
2 granted patents·1 citations·filing 2012–2016
30Inventor score
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2 records- 0146US9575406B2Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing methodVAN DER GAAG MARC LÉON·Filed 2012·Granted Feb 21, 2017·1 cites·20 claims
- 0242US10281830B2Patterning device cooling systems in a lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted May 7, 2019·0 cites·18 claims
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