Inventor · disambiguated record
Burkhard Volland
Also filed as: VOLLAND BURKHARD
2 granted patents·1 pending application·12 citations·filing 2001–2008
55Inventor score
Top patents by PatentIndex Score
3 records- 0172US8312561B2Device and method for the micromechanical positioning and handling of an objectRANGELOW IVO W·Filed 2008·Granted Nov 13, 2012·9 cites·17 claims
- 0252US8689359B2Apparatus and method for investigating surface properties of different materialsRANGELOW IVO W·Filed 2008·Granted Apr 1, 2014·3 cites·11 claims
- 0330US2002081173A1Apparatus for loading a substrate onto a processing surface in a thin-film processing chamberOXFORD INSTR PLASMA TECHNOLOGY·Filed 2001·Application pending·0 cites
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