Inventor

RANISH JOSEPH M

US152 patents

⚠️ This page may combine multiple inventors who share the name “RANISH JOSEPH M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RANISH JOSEPH M

APPLIED MATERIALS INC

Method for forming silicon-containing materials during a photoexcitation deposition process

Method for forming silicon-containing materials during a photoexcitation deposition process

Lamphead for a rapid thermal processing chamber

Semiconductor processing system with lamp cooling

Pulse train annealing method and apparatus

Thermal flux laser annealing for ion implantation of semiconductor P-N junctions

Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodes

Rapid thermal processing chamber with micro-positioning system

Temperature measurement and control of wafer support in thermal processing chamber

Stepped reflector plate

Thermally matched support ring for substrate processing chamber

Lamp array for thermal processing exhibiting improved radial uniformity

Apparatus and method for controlling a flow process material to a deposition chamber

Annealing apparatus using two wavelengths of radiation

System for non radial temperature control for rotating substrates

Bottom processing

Upper dome with injection assembly

Rapid thermal processing chamber with micro-positioning system

Pulse train annealing method and apparatus

Support ring with masked edge

Rapid thermal processing chamber with micro-positioning system

Chambers with improved cooling devices

Edge ring lip

Rapid thermal processing lamphead with improved cooling

Apparatus including heating source reflective filter for pyrometry

Method and apparatus for verifying proper substrate positioning

Lamp for rapid thermal processing chamber

Compensation techniques for substrate heating processes

Support cylinder for thermal processing chamber

Substrate processing system having susceptorless substrate support with enhanced substrate heating control

Lamp assembly having flexibly positioned rigid plug

Multi zone spot heating in EPI

Multi zone spot heating in EPI

Multi zone spot heating in epi

Light pipe window structure for low pressure thermal processes

RANISH JOSEPH M

Rapid thermal processing lamphead with improved cooling

Lamp for rapid thermal processing chamber

Multizone control of lamps in a conical lamphead using pyrometers

Silver reflectors for semiconductor processing chambers

Apparatus including heating source reflective filter for pyrometry

KOELMEL BLAKE

Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber

Edge ring for a thermal processing chamber

Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber

Apparatus and methods for positioning a substrate using capacitive sensors

ADERHOLD WOLFGANG R

System for non radial temperature control for rotating substrates

System for non radial temperature control for rotating substrates

SINGH KAUSHAL K

Method for forming silicon-containing materials during a photoexcitation deposition process

SORABJI KHURSHED

Rapid thermal processing chamber with micro-positioning system

KOELMEL BLAKE R

Apparatus and method for improved control of heating and cooling of substrates

EWERT MAURICE E

Off-angled heating of the underside of a substrate using a lamp assembly