Inventor · disambiguated record
Akio Takemoto
Also filed as: TAKEMOTO AKIO
4 granted patents·83 citations·filing 1996–2000
79Inventor score
Top patents by PatentIndex Score
4 records- 0184US6242751B1Charged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1999·Granted Jun 5, 2001·33 cites·62 claims
- 0279US5757015ACharged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1996·Granted May 26, 1998·25 cites·22 claims
- 0375US5969365ACharged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1997·Granted Oct 19, 1999·20 cites·18 claims
- 0452US6573519B1Electron beam exposure apparatus, adjusting method, and block mask for adjustmentADVANTEST CORP·Filed 2000·Granted Jun 3, 2003·5 cites·6 claims
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