Inventor · disambiguated record
Tomohiro Sakazaki
Also filed as: SAKAZAKI TOMOHIRO
5 granted patents·1 pending application·82 citations·filing 1996–2011
81Inventor score
Top patents by PatentIndex Score
6 records- 0184US6242751B1Charged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1999·Granted Jun 5, 2001·33 cites·62 claims
- 0279US5757015ACharged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1996·Granted May 26, 1998·25 cites·22 claims
- 0375US5969365ACharged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1997·Granted Oct 19, 1999·20 cites·18 claims
- 0443US8466439B2Electron beam lithography apparatus and electron beam lithography methodYAMADA AKIO·Filed 2011·Granted Jun 18, 2013·0 cites·6 claims
- 0542US2008049204A1Multi-column type electron beam exposure apparatusYABARA HIDEFUMI·Filed 2007·Application pending·0 cites
- 0638US6344655B1Multicolumn charged-particle beam lithography systemADVANTEST CORP·Filed 1999·Granted Feb 5, 2002·4 cites·3 claims
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