Inventor
KADOGUCHI MAKOTO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KADOGUCHI MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOBE STEEL LTD
7 patentsUS6491518B1Dec 10, 2002
Apparatus for high-temperature and high-pressure treatment
KOBE STEEL LTD31 citations92
US6285010B1Sep 4, 2001
Method and device for high-temperature, high-pressure treatment of semiconductor wafer
KOBE STEEL LTD30 citations92
US6790774B2Sep 14, 2004
Method of forming a wiring film by applying high temperature/high pressure
KOBE STEEL LTD15 citations82
US6733592B2May 11, 2004
High-temperature and high-pressure treatment device
KOBE STEEL LTD11 citations73
US6328560B1Dec 11, 2001
Pressure processing apparatus for semiconductors
KOBE STEEL LTD14 citations73
US6455446B2Sep 24, 2002
High-temperature high-pressure processing method for semiconductor wafers, and an anti-oxidizing body used for the method
KOBE STEEL LTD4 citations62
US6299739B1Oct 9, 2001
Method of forming metal wiring film
KOBE STEEL LTD5 citations61