Inventor
ISO AKINORI
JP6 patents
Patents
6 patentsUS6363950B2Apr 2, 2002
Apparatus for processing substrate using process solutions having desired mixing ratios
SHIBAURA MECHATRONICS CORP19 citations88
US6299697B1Oct 9, 2001
Method and apparatus for processing substrate
SHIBAURA MECHATRONICS CORP21 citations88
US10325787B2Jun 18, 2019
Substrate processing apparatus and substrate processing method
SHIBAURA MECHATRONICS CORP1 citations60
US11906246B2Feb 20, 2024
Organic film forming apparatus
SHIBAURA MECHATRONICS CORP0 citations44
US12363801B2Jul 15, 2025
Heat treatment device
SHIBAURA MECHATRONICS CORP0 citations36
US10421622B2Sep 24, 2019
Floating conveyor and substrate processing apparatus
SHIBAURA MECHATRONICS CORP0 citations31