Inventor · disambiguated record
Fransiscus Godefridus Casper Bijnen
Also filed as: BIJNEN FRANSISCUS GODEFRIDUS C · BIJNEN FRANSISCUS GODEFRIDUS CASPER
7 granted patents·107 citations·filing 2003–2005
85Inventor score
Files withASML NETHERLANDS BV7
Top patents by PatentIndex Score
7 records- 0190US7459247B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 2, 2008·34 cites·34 claims
- 0286US6936385B2Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methodsASML NETHERLANDS BV·Filed 2003·Granted Aug 30, 2005·37 cites·26 claims
- 0377US7751047B2Alignment and alignment marksASML NETHERLANDS BV·Filed 2005·Granted Jul 6, 2010·8 cites·17 claims
- 0477US7420676B2Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Sep 2, 2008·19 cites·25 claims
- 0565US7477403B2Optical position assessment apparatus and methodASML NETHERLANDS BV·Filed 2004·Granted Jan 13, 2009·8 cites·44 claims
- 0647US7193231B2Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Mar 20, 2007·1 cites·23 claims
- 0737US7398177B2Measurement substrate, substrate table, lithographic apparatus, method of calculating an angle of an alignment beam of an alignment system, and alignment verification methodASML NETHERLANDS BV·Filed 2004·Granted Jul 8, 2008·0 cites·9 claims
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