Inventor · disambiguated record
Yusaku Uehara
Also filed as: UEHARA YUSAKU
3 granted patents·2 pending applications·36 citations·filing 2006–2009
63Inventor score
Top patents by PatentIndex Score
5 records- 0188US7817249B2Exposure method and apparatus, and device producing method using two light beams to correct non-rotationally symmetric aberrationNIKON CORP·Filed 2006·Granted Oct 19, 2010·34 cites·41 claims
- 0260US8253924B2Exposure method, exposure apparatus and device manufacturing methodUEHARA YUSAKU·Filed 2006·Granted Aug 28, 2012·2 cites·43 claims
- 0354US2010186942A1Reticle error reduction by coolingPHILLIPS ALTON H·Filed 2009·Application pending·0 cites
- 0447US9304385B2Exposure method and device manufacturing method including selective deformation of a maskPHILLIPS ALTON H·Filed 2009·Granted Apr 5, 2016·0 cites·20 claims
- 0539US2008204682A1Exposure method and exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →