Inventor · disambiguated record
Rahul Lakhawat
Also filed as: LAKHAWAT RAHUL
3 granted patents·1 pending application·16 citations·filing 2015–2018
64Inventor score
Files withKLA TENCOR CORP4
Top patents by PatentIndex Score
4 records- 0191US9518934B2Wafer defect discoveryKLA TENCOR CORP·Filed 2015·Granted Dec 13, 2016·12 cites·20 claims
- 0274US9996942B2Sub-pixel alignment of inspection to designKLA TENCOR CORP·Filed 2016·Granted Jun 12, 2018·3 cites·22 claims
- 0361US10949964B2Super-resolution defect review image generation through generative adversarial networksKLA TENCOR CORP·Filed 2018·Granted Mar 16, 2021·1 cites·12 claims
- 0448US2017076911A1Wafer Defect DiscoveryKLA TENCOR CORP·Filed 2016·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →