Inventor · disambiguated record
Gilles Amblard
Also filed as: AMBLARD GILLES · AMBLARD GILLES R
10 granted patents·148 citations·filing 2003–2008
90Inventor score
Top patents by PatentIndex Score
10 records- 0190US7056646B1Use of base developers as immersion lithography fluidADVANCED MICRO DEVICES INC·Filed 2003·Granted Jun 6, 2006·37 cites·20 claims
- 0286US7014966B2Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systemsADVANCED MICRO DEVICES INC·Filed 2003·Granted Mar 21, 2006·29 cites·22 claims
- 0382US6764946B1Method of controlling line edge roughness in resist filmsADVANCED MICRO DEVICES INC·Filed 2003·Granted Jul 20, 2004·29 cites·14 claims
- 0480US7064846B1Non-lithographic shrink techniques for improving line edge roughness and using imperfect (but simpler) BARCsADVANCED MICRO DEVICES INC·Filed 2003·Granted Jun 20, 2006·17 cites·25 claims
- 0572US7704674B1Method for patterning a photo-resist in an immersion lithography processAMBLARD GILLES·Filed 2008·Granted Apr 27, 2010·7 cites·18 claims
- 0667US7159205B1Use of non-lithographic shrink techniques for fabrication/making of imprints masksADVANCED MICRO DEVICES INC·Filed 2004·Granted Jan 2, 2007·8 cites·6 claims
- 0765US7262138B1Organic BARC with adjustable etch rateADVANCED MICRO DEVICES INC·Filed 2004·Granted Aug 28, 2007·9 cites·13 claims
- 0858US7405032B1Combination of non-lithographic shrink techniques and trim process for gate formation and line-edge roughness reductionADVANCED MICRO DEVICES INC·Filed 2003·Granted Jul 29, 2008·8 cites·21 claims
- 0954US7799514B1Surface treatment with an acidic composition to prevent substrate and environmental contaminationGLOBALFOUNDRIES INC·Filed 2004·Granted Sep 21, 2010·3 cites·5 claims
- 1046US7741012B1Method for removal of immersion lithography medium in immersion lithography processesADVANCED MICRO DEVICES INC·Filed 2004·Granted Jun 22, 2010·1 cites·20 claims
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