Inventor · disambiguated record
Mitsuhiro Iwano
Also filed as: IWANO MITSUHIRO
4 granted patents·4 pending applications·3 citations·filing 2018–2025
60Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0172US10529583B2Etching methodTOKYO ELECTRON LTD·Filed 2018·Granted Jan 7, 2020·2 cites·14 claims
- 0269US2024290625A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0368US10734205B2Cleaning method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 4, 2020·1 cites·14 claims
- 0453US12014930B2Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jun 18, 2024·0 cites·5 claims
- 0549US2025232954A1Plasma processing apparatus and power supply systemTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0649US2025226181A1Plasma processing apparatus and power supply systemTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0747US2025201536A1Plasma processing method and plasma processing systemTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0845US11710643B2Method of etching and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jul 25, 2023·0 cites·13 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →