Inventor
TOZAWA TAKASHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TOZAWA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS5611655AMar 18, 1997
Vacuum process apparatus and vacuum processing method
TOKYO ELECTRON LTD143 citations94
US5407350AApr 18, 1995
Heat-treatment apparatus
TOKYO ELECTRON LTD46 citations92
US5554249ASep 10, 1996
Magnetron plasma processing system
TOKYO ELECTRON LTD30 citations90
US5224999AJul 6, 1993
Heat treatment apparatus
TOKYO ELECTRON LTD12 citations72
USD365584SDec 26, 1995
Semiconductor manufacturing device
TOKYO ELECTRON LTD12 citations71
MITSUBISHI CHEM IND
2 patentsUS4665059AMay 12, 1987
Composition for reducing the phytotoxicity of agricultural machine oil containing a sucrose fatty acid ester and/or urea
MITSUBISHI CHEM IND5 citations70
US4541859ASep 17, 1985
Method for reducing the phytotoxicity of agricultural machine oil and a composition useful for the method
MITSUBISHI CHEM IND4 citations59