USD365584SExpiredUtility

Semiconductor manufacturing device

62
Assignee: TOKYO ELECTRON LTDPriority: Dec 15, 1993Filed: Jun 6, 1994Granted: Dec 26, 1995
Est. expiryDec 15, 2013(expired)· nominal 20-yr term from priority
Inventors:Tatsuya NakagomeTakashi Tozawa
62
PatentIndex Score
12
Cited by
4
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a semiconductor manufacturing device, as shown.

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