Inventor · disambiguated record
Takashi Tozawa
Also filed as: TOZAWA TAKASHI
5 granted patents·243 citations·filing 1992–1996
84Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0189US5611655AVacuum process apparatus and vacuum processing methodTOKYO ELECTRON LTD·Filed 1996·Granted Mar 18, 1997·143 cites·13 claims
- 0284US5407350AHeat-treatment apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Apr 18, 1995·46 cites·9 claims
- 0362USD365584SSemiconductor manufacturing deviceTOKYO ELECTRON LTD·Filed 1994·Granted Dec 26, 1995·12 cites·1 claims
- 0461US5554249AMagnetron plasma processing systemTOKYO ELECTRON LTD·Filed 1995·Granted Sep 10, 1996·30 cites·20 claims
- 0540US5224999AHeat treatment apparatusTOKYO ELECTRON LTD·Filed 1992·Granted Jul 6, 1993·12 cites·6 claims
Join the waitlist — get patent alerts
Get an alert when Takashi Tozawa files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →