Inventor

SHORTT RICHARD F

US3 patents

Patents

3 patents

US5493076AFeb 20, 1996

Structure for repairing semiconductor substrates

IBM21 citations90

US5446961ASep 5, 1995

Method for repairing semiconductor substrates

IBM26 citations90

US6444082B1Sep 3, 2002

Apparatus and method for removing a bonded lid from a substrate

IBM10 citations71