Inventor · disambiguated record
Peter Edwards
Also filed as: EDWARDS PETER · EDWARDS PETER I T · EDWARDS PETER IVOR TUDOR
11 granted patents·2 pending applications·180 citations·filing 1991–2010
91Inventor score
Top patents by PatentIndex Score
13 records- 0188US7282427B1Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2006·Granted Oct 16, 2007·11 cites·7 claims
- 0288US6908836B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2002·Granted Jun 21, 2005·26 cites·18 claims
- 0380US7253424B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2006·Granted Aug 7, 2007·6 cites·34 claims
- 0479US6956223B2Multi-directional scanning of movable member and ion beam monitoring arrangement thereforAPPLIED MATERIALS INC·Filed 2002·Granted Oct 18, 2005·24 cites·44 claims
- 0576US7235797B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2005·Granted Jun 26, 2007·3 cites·19 claims
- 0672US5981961AApparatus and method for improved scanning efficiency in an ion implanterAPPLIED MATERIALS INC·Filed 1997·Granted Nov 9, 1999·44 cites·53 claims
- 0771US7053386B1Method and apparatus for implanting semiconductor wafer substratesAPPLIED MATERIALS INC·Filed 2001·Granted May 30, 2006·20 cites·28 claims
- 0869US7049210B2Method of implanting a substrate and an ion implanter for performing the methodAPPLIED MATERIALS INC·Filed 2004·Granted May 23, 2006·11 cites·11 claims
- 0951US2005191409A1Ion beam monitoring arrangementFiled 2005·Application pending·0 cites
- 1050US2011042578A1Ion beam monitoring arrangementMURRELL ADRIAN·Filed 2010·Application pending·0 cites
- 1141US5217341AMethod for aligning wafers within a semiconductor wafer cassetteAPPLIED MATERIALS INC·Filed 1992·Granted Jun 8, 1993·16 cites·2 claims
- 1240US5149244AApparatus for aligning wafers within a semiconductor wafer cassetteAPPLIED MATERIALS INC·Filed 1991·Granted Sep 22, 1992·15 cites·8 claims
- 1338US6392245B1Scanning wheel for ion implantation process chamberAPPLIED MATERIALS INC·Filed 1998·Granted May 21, 2002·4 cites·15 claims
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