Inventor
HOMBO TERUAKI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “HOMBO TERUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
6 patentsUS9362129B2Jun 7, 2016
Polishing apparatus and polishing method
EBARA CORP7 citations83
US9673067B2Jun 6, 2017
Substrate processing apparatus and processed substrate manufacturing method
EBARA CORP3 citations72
US11380559B2Jul 5, 2022
Carrier device, work processing apparatus, control method of carrier device and storage medium storing program
EBARA CORP2 citations71
US10018545B2Jul 10, 2018
Substrate cleaning apparatus and method executed in the same
EBARA CORP0 citations51
US11056359B2Jul 6, 2021
Cleaning apparatus and substrate processing apparatus
EBARA CORP0 citations50
US10438818B2Oct 8, 2019
Substrate processing apparatus and pipe cleaning method for substrate processing apparatus
EBARA CORP0 citations41