Inventor · disambiguated record
Rob Tousain
Also filed as: TOUSAIN ROB
3 granted patents·30 citations·filing 1998–2006
69Inventor score
Top patents by PatentIndex Score
3 records- 0175US7576832B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Aug 18, 2009·5 cites·18 claims
- 0272US7170581B2Self-adapting feedforward control tuning for motion system, and lithographic apparatus provided with such a motion systemASML NETHERLANDS BV·Filed 2004·Granted Jan 30, 2007·13 cites·19 claims
- 0352US6163429ALearning to compensate for randomly occurring shocksPHILIPS CORP·Filed 1998·Granted Dec 19, 2000·12 cites·11 claims
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