Inventor
SONOYAMA TAKAHIRO
JP6 patents
Patents
6 patentsUS9508822B2Nov 29, 2016
Semiconductor device
TOYODA GOSEI KK13 citations82
US9691846B2Jun 27, 2017
Semiconductor device including an insulating layer which includes negatively charged microcrystal
TOYODA GOSEI KK2 citations71
US10074728B2Sep 11, 2018
Semiconductor device
TOYODA GOSEI KK0 citations50
US10026808B2Jul 17, 2018
Semiconductor device including insulating film that includes negatively charged microcrystal
TOYODA GOSEI KK0 citations50
US9299567B2Mar 29, 2016
Manufacturing method of MIS-type semiconductor device, including heating a zirconium oxynitride (ZrON) layer
TOYODA GOSEI KK0 citations47
US9793369B2Oct 17, 2017
MIS-type semiconductor device
TOYODA GOSEI KK1 citations45