Inventor
MITRA ANUPAM
JP12 patents
⚠️ This page may combine multiple inventors who share the name “MITRA ANUPAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KIOXIA CORP
4 patentsUS12510833B2Dec 30, 2025
Imprint apparatus, pattern forming method, and method of manufacturing semiconductor device
KIOXIA CORP0 citations62
US11852985B2Dec 26, 2023
Imprint method, imprint apparatus, and film formation apparatus
KIOXIA CORP0 citations62
US11762285B2Sep 19, 2023
Template, patterning method, and method for manufacturing semiconductor device
KIOXIA CORP0 citations62
US11669011B2Jun 6, 2023
Template, template manufacturing method, and semiconductor device manufacturing method
KIOXIA CORP0 citations62
TOSHIBA MEMORY CORP
4 patentsUS11192282B2Dec 7, 2021
Template, template manufacturing method, and semiconductor device manufacturing method
TOSHIBA MEMORY CORP0 citations62
US10796948B2Oct 6, 2020
Pattern forming method and imprint apparatus
TOSHIBA MEMORY CORP1 citations61
US10274822B2Apr 30, 2019
Template and method of manufacturing semiconductor device
TOSHIBA MEMORY CORP1 citations58
US10725374B2Jul 28, 2020
Template substrate, method of manufacturing template substrate, and method of manufacturing semiconductor device
TOSHIBA MEMORY CORP0 citations49