Inventor · disambiguated record

Frances Katherine Zelaya

Also filed as: ZELAYA FRANCES KATHERINE

1 granted patent·1 citations·filing 2014–2014

16Inventor score

Technology areasH10P

Files withLAM RES CORP1

Top patents by PatentIndex Score

1 record

0157US9284644B2Apparatus and method for improving wafer uniformityLAM RES CORP·Filed 2014·Granted Mar 15, 2016·1 cites·24 claims

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