Inventor · disambiguated record

Maarten Lambertus Henricus Ter Heerdt

Also filed as: TER HEERDT MAARTEN LAMBERTUS HENRICUS

1 granted patent·0 citations·filing 2020–2020

10Inventor score

Technology areasH01J

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0154US11158484B2Electron beam inspection tool and method of controlling heat loadASML NETHERLANDS BV·Filed 2020·Granted Oct 26, 2021·0 cites·20 claims

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