Inventor
KILPI VÄINÖ
FI9 patents
Patents
9 patentsUS11004707B1May 11, 2021
Substrate processing apparatus and method
PICOSUN OY9 citations82
US9745661B2Aug 29, 2017
Method and apparatus for forming a substrate web track in an atomic layer deposition reactor
PICOSUN OY4 citations71
US12300523B2May 13, 2025
Substrate processing apparatus and method
PICOSUN OY1 citations60
US12110588B2Oct 8, 2024
Adjustable fluid inlet assembly for a substrate processing apparatus and method
PICOSUN OY0 citations60
US11505864B2Nov 22, 2022
Adjustable fluid inlet assembly for a substrate processing apparatus and method
PICOSUN OY0 citations60
US12112927B2Oct 8, 2024
Substrate processing apparatus and method
PICOSUN OY1 citations59
US12325915B2Jun 10, 2025
Substrate processing apparatus and method
PICOSUN OY0 citations53
US12247288B2Mar 11, 2025
Substrate processing apparatus and method
PICOSUN OY0 citations49
US11414758B2Aug 16, 2022
Sample protection
PICOSUN OY0 citations47