Inventor
AKAO TOKUNOBU
JP19 patents
⚠️ This page may combine multiple inventors who share the name “AKAO TOKUNOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
7 patentsUS12050138B2Jul 30, 2024
Substrate processing apparatus, and thermocouple
KOKUSAI ELECTRIC CORP2 citations72
USD976129SJan 24, 2023
Temperature sensor
KOKUSAI ELECTRIC CORP3 citations72
USD973520SDec 27, 2022
Temperature sensor
KOKUSAI ELECTRIC CORP2 citations72
US11300456B2Apr 12, 2022
Substrate processing apparatus, and thermocouple
KOKUSAI ELECTRIC CORP3 citations72
US12504332B2Dec 23, 2025
Substrate temperature sensor, substrate retainer and substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations62
US11906367B2Feb 20, 2024
Substrate temperature sensor, substrate retainer and substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations62
USD924701SJul 13, 2021
Temperature sensor
KOKUSAI ELECTRIC CORP0 citations62
HITACHI INT ELECTRIC INC
5 patentsUSD803075SNov 21, 2017
Thermometry tool for substrate processing apparatus
HITACHI INT ELECTRIC INC2 citations72
USD819463SJun 5, 2018
Protector tube for thermocouple
HITACHI INT ELECTRIC INC2 citations71
USD818850SMay 29, 2018
Protector tube for thermocouple
HITACHI INT ELECTRIC INC4 citations71
US10228291B2Mar 12, 2019
Substrate processing apparatus, and thermocouple
HITACHI INT ELECTRIC INC1 citations62
US10684174B2Jun 16, 2020
Substrate processing apparatus, and thermocouple
HITACHI INT ELECTRIC INC0 citations51
KOKUSAI ELECTRIC CO LTD
3 patentsUS6742977B1Jun 1, 2004
Substrate processing device, substrate conveying device, and substrate processing method
KOKUSAI ELECTRIC CO LTD75 citations94
US5850071ADec 15, 1998
Substrate heating equipment for use in a semiconductor fabricating apparatus
KOKUSAI ELECTRIC CO LTD81 citations92
US5957651ASep 28, 1999
Substrate carrying apparatus
KOKUSAI ELECTRIC CO LTD40 citations88
AKAO TOKUNOBU
3 patentsUS8486222B2Jul 16, 2013
Substrate processing apparatus and method of manufacturing a semiconductor device
AKAO TOKUNOBU3 citations57
US8795433B2Aug 5, 2014
Substrate processing apparatus
AKAO TOKUNOBU1 citations50
US8557720B2Oct 15, 2013
Substrate processing apparatus and method of manufacturing a semiconductor device
AKAO TOKUNOBU1 citations47