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Thermometry tool for substrate processing apparatus

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Assignee: HITACHI INT ELECTRIC INCPriority: Feb 10, 2016Filed: Jul 28, 2016Granted: Nov 21, 2017
Est. expiryFeb 10, 2036(~9.6 yrs left)· nominal 20-yr term from priority
Inventors:Tokunobu AkaoMotoya TakewakiAkihiro OsakaMasaaki UenoTetsuya KosugiMasashi Sugishita
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CLAIM 
     
       We claim the ornamental design for a thermometry tool for substrate processing apparatus, as shown (and described).

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