Inventor · disambiguated record
Tetsuya Kosugi
Also filed as: KOSUGI TETSUYA
39 granted patents·10 pending applications·123 citations·filing 2009–2025
97Inventor score
Top patents by PatentIndex Score
49 records- 0194US12050138B2Substrate processing apparatus, and thermocoupleKOKUSAI ELECTRIC CORP·Filed 2021·Granted Jul 30, 2024·2 cites·20 claims
- 0287US11300456B2Substrate processing apparatus, and thermocoupleKOKUSAI ELECTRIC CORP·Filed 2019·Granted Apr 12, 2022·3 cites·20 claims
- 0387US11043402B2Cooling unit, heat insulating structure, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2018·Granted Jun 22, 2021·4 cites·11 claims
- 0485USD826185SCeiling heater for substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2017·Granted Aug 21, 2018·24 cites·1 claims
- 0584US9587884B2Insulation structure and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2014·Granted Mar 7, 2017·2 cites·20 claims
- 0676US9695511B2Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrateHITACHI INT ELECTRIC INC·Filed 2014·Granted Jul 4, 2017·3 cites·6 claims
- 0776US9460946B2Substrate processing apparatus and heating equipmentMURATA HITOSHI·Filed 2011·Granted Oct 4, 2016·4 cites·8 claims
- 0875US2024393050A1Heater, temperature control system, and processing apparatusKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 0974USD980177SCeiling heater for substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2021·Granted Mar 7, 2023·7 cites·1 claims
- 1074USD959393SCeiling heater for substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2021·Granted Aug 2, 2022·7 cites·1 claims
- 1174US10340151B2Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2015·Granted Jul 2, 2019·2 cites·12 claims
- 1273USD918848SRetainer of ceiling heater for semiconductor fabrication apparatusKOKUSAI ELECTRIC CORP·Filed 2019·Granted May 11, 2021·12 cites·1 claims
- 1373US9449849B2Method of manufacturing semiconductor device using meander-shaped heating elementHITACHI INT ELECTRIC INC·Filed 2014·Granted Sep 20, 2016·2 cites·7 claims
- 1473US2025239472A1Substrate processing apparatus, method of manufacturing semiconductor device, temperature meter and heater unitKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 1571US10228291B2Substrate processing apparatus, and thermocoupleHITACHI INT ELECTRIC INC·Filed 2016·Granted Mar 12, 2019·1 cites·12 claims
- 1668US2025179642A1Substrate processing apparatus and ceiling heaterKOKUSAI ELECTRIC CORP·Filed 2025·Application pending·0 cites
- 1767US10415136B2Substrate processing apparatus including heating and cooling device, and ceiling part included in the sameHITACHI INT ELECTRIC INC·Filed 2016·Granted Sep 17, 2019·1 cites·12 claims
- 1866USD976129STemperature sensorKOKUSAI ELECTRIC CORP·Filed 2021·Granted Jan 24, 2023·3 cites·1 claims
- 1964US11049742B2Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple supportKOKUSAI ELECTRIC CORP·Filed 2019·Granted Jun 29, 2021·0 cites·8 claims
- 2063US12293930B2Substrate processing apparatus, method of manufacturing semiconductor device and heaterKOKUSAI ELECTRIC CORP·Filed 2021·Granted May 6, 2025·0 cites·15 claims
- 2163US12085338B2Heater, temperature control system, and processing apparatusKOKUSAI ELECTRIC CORP·Filed 2020·Granted Sep 10, 2024·0 cites·18 claims
- 2263US8847124B2Heating device having a meander-shaped heating element with an insulating body accomodating the same, and the substrate processing apparatus including the sameMURATA HITOSHI·Filed 2010·Granted Sep 30, 2014·1 cites·7 claims
- 2362US10684174B2Substrate processing apparatus, and thermocoupleHITACHI INT ELECTRIC INC·Filed 2018·Granted Jun 16, 2020·0 cites·16 claims
- 2461US8822240B2Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor deviceKOSUGI TETSUYA·Filed 2012·Granted Sep 2, 2014·1 cites·18 claims
- 2561US2024222160A1Ceiling heater, substrate processing method, method of manufacturing semiconductor device and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 2660US12241159B2Substrate processing apparatus and ceiling heaterKOKUSAI ELECTRIC CORP·Filed 2019·Granted Mar 4, 2025·0 cites·17 claims
- 2758US10418293B2Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple supportHITACHI INT ELECTRIC INC·Filed 2017·Granted Sep 17, 2019·0 cites·10 claims
- 2858US2025232993A1Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording MediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 2957US12461507B2Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control programKOKUSAI ELECTRIC CORP·Filed 2020·Granted Nov 4, 2025·0 cites·18 claims
- 3057US9269638B2Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2014·Granted Feb 23, 2016·0 cites·19 claims
- 3156USD824440SHeater of substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2016·Granted Jul 31, 2018·7 cites·1 claims
- 3254USD962184SRetainer plate of top heater for wafer processing furnaceKOKUSAI ELECTRIC CORP·Filed 2019·Granted Aug 30, 2022·5 cites·1 claims
- 3354USD962183SRetainer plate of top heater for wafer processing furnaceKOKUSAI ELECTRIC CORP·Filed 2019·Granted Aug 30, 2022·5 cites·1 claims
- 3454USD825501SAir flow controller for heater of substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2017·Granted Aug 14, 2018·6 cites·1 claims
- 3554US2014120636A1Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple supportHITACHI INT ELECTRIC INC·Filed 2013·Application pending·0 cites
- 3653US2023257883A1Substrate processing apparatus, recording medium, and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 3751US2022139737A1Temperature sensor, heater unit, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2021·Application pending·0 cites
- 3849USD823363SHeater of substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2016·Granted Jul 17, 2018·5 cites·1 claims
- 3949US2015370245A1Substrate processing apparatus, substrate processing method, semiconductor device manufacturing method, and control programHITACHI INT ELECTRIC INC·Filed 2013·Application pending·0 cites
- 4048US8535444B2Substrate processing apparatus, method of manufacturing semiconductor device, and ceiling insulating partMURATA HITOSHI·Filed 2009·Granted Sep 17, 2013·0 cites·4 claims
- 4145USD818850SProtector tube for thermocoupleHITACHI INT ELECTRIC INC·Filed 2017·Granted May 29, 2018·4 cites·1 claims
- 4244USD860420SElectric furnace for substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2018·Granted Sep 17, 2019·3 cites·1 claims
- 4344USD860419SElectric furnace for substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2018·Granted Sep 17, 2019·3 cites·1 claims
- 4440US2019024232A1Substrate processing apparatus and substrate retainerHITACHI INT ELECTRIC INC·Filed 2018·Application pending·0 cites
- 4538USD825502SHeater for substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2017·Granted Aug 14, 2018·2 cites·1 claims
- 4637USD819463SProtector tube for thermocoupleHITACHI INT ELECTRIC INC·Filed 2017·Granted Jun 5, 2018·2 cites·1 claims
- 4737USD803075SThermometry tool for substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2016·Granted Nov 21, 2017·2 cites·1 claims
- 4836US9064912B2Heating device, substrate processing apparatus, and method of manufacturing semiconductor deviceMURATA HITOSHI·Filed 2010·Granted Jun 23, 2015·0 cites·11 claims
- 4934US9779970B2Heater supporting deviceKOSUGI TETSUYA·Filed 2011·Granted Oct 3, 2017·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →