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Ceiling heater for substrate processing apparatus

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Assignee: KOKUSAI ELECTRIC CORPPriority: Sep 24, 2020Filed: Mar 12, 2021Granted: Mar 7, 2023
Est. expirySep 24, 2040(~14.2 yrs left)· nominal 20-yr term from priority
Inventors:Shinobu SugiuraTetsuya KosugiYuya YoshimuraTakuto Shoji
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PatentIndex Score
7
Cited by
26
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a ceiling heater for substrate processing apparatus, as shown and described.

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