USD959393SActiveUtility

Ceiling heater for substrate processing apparatus

74
Assignee: KOKUSAI ELECTRIC CORPPriority: Sep 24, 2020Filed: Mar 12, 2021Granted: Aug 2, 2022
Est. expirySep 24, 2040(~14.2 yrs left)· nominal 20-yr term from priority
Inventors:Shinobu SugiuraTetsuya KosugiYuya YoshimuraTakuto Shoji
74
PatentIndex Score
7
Cited by
29
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a ceiling heater for substrate processing apparatus, as shown and described.

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