USD825501SActiveUtility

Air flow controller for heater of substrate processing apparatus

54
Assignee: HITACHI INT ELECTRIC INCPriority: Oct 14, 2016Filed: Mar 13, 2017Granted: Aug 14, 2018
Est. expiryOct 14, 2036(~10.3 yrs left)· nominal 20-yr term from priority
Inventors:Takatomo YamaguchiTetsuya KosugiShuhei Saido
54
PatentIndex Score
6
Cited by
12
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for an air flow controller for heater of substrate processing apparatus, as shown and described.

Cited by (0)

No later patents cite this yet.

References (0)

No backward citations on record.