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Electric furnace for substrate processing apparatus

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Assignee: KOKUSAI ELECTRIC CORPPriority: Feb 27, 2018Filed: Jul 12, 2018Granted: Sep 17, 2019
Est. expiryFeb 27, 2038(~11.6 yrs left)· nominal 20-yr term from priority
Inventors:Tetsuya KosugiHitoshi MurataMasaaki Ueno
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PatentIndex Score
3
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18
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1
Claims

Claims

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CLAIM 
     
       The ornamental design for an electric furnace for substrate processing apparatus, as shown and described.

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