Inventor · disambiguated record
Motoya Takewaki
Also filed as: TAKEWAKI MOTOYA
15 granted patents·1 pending application·32 citations·filing 2014–2021
89Inventor score
Top patents by PatentIndex Score
16 records- 0194US12050138B2Substrate processing apparatus, and thermocoupleKOKUSAI ELECTRIC CORP·Filed 2021·Granted Jul 30, 2024·2 cites·20 claims
- 0287US11300456B2Substrate processing apparatus, and thermocoupleKOKUSAI ELECTRIC CORP·Filed 2019·Granted Apr 12, 2022·3 cites·20 claims
- 0384US9587884B2Insulation structure and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2014·Granted Mar 7, 2017·2 cites·20 claims
- 0474US10340151B2Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2015·Granted Jul 2, 2019·2 cites·12 claims
- 0571US10228291B2Substrate processing apparatus, and thermocoupleHITACHI INT ELECTRIC INC·Filed 2016·Granted Mar 12, 2019·1 cites·12 claims
- 0667US10415136B2Substrate processing apparatus including heating and cooling device, and ceiling part included in the sameHITACHI INT ELECTRIC INC·Filed 2016·Granted Sep 17, 2019·1 cites·12 claims
- 0762US10684174B2Substrate processing apparatus, and thermocoupleHITACHI INT ELECTRIC INC·Filed 2018·Granted Jun 16, 2020·0 cites·16 claims
- 0856USD824440SHeater of substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2016·Granted Jul 31, 2018·7 cites·1 claims
- 0954US11913116B2Substrate processing apparatus and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2020·Granted Feb 27, 2024·0 cites·11 claims
- 1053USD790490SReaction tubeHITACHI INT ELECTRIC INC·Filed 2016·Granted Jun 27, 2017·6 cites·1 claims
- 1149USD823363SHeater of substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2016·Granted Jul 17, 2018·5 cites·1 claims
- 1241US2021092798A1Substrate Processing Apparatus and Gas BoxKOKUSAI ELECTRIC CORP·Filed 2020·Application pending·0 cites
- 1337USD803075SThermometry tool for substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2016·Granted Nov 21, 2017·2 cites·1 claims
- 1433USD778741SProtector tube for thermocoupleHITACHI INT ELECTRIC INC·Filed 2015·Granted Feb 14, 2017·1 cites·1 claims
- 1529USD786951SReaction tubeHITACHI INT ELECTRIC INC·Filed 2015·Granted May 16, 2017·0 cites·1 claims
- 1629USD778742SProtector tube for thermocoupleHITACHI INT ELECTRIC INC·Filed 2015·Granted Feb 14, 2017·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →