Inventor · disambiguated record

Dong Choon Suh

Also filed as: SUH DONG CHOON

1 granted patent·32 citations·filing 2002–2002

45Inventor score

Technology areasH10P

Files withAPPLIED MATERIALS INC1

Top patents by PatentIndex Score

1 record

0181US6825447B2Apparatus and method for uniform substrate heating and contaminate collectionAPPLIED MATERIALS INC·Filed 2002·Granted Nov 30, 2004·32 cites·24 claims

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