Inventor · disambiguated record
Heather Landis
Also filed as: LANDIS HEATHER
1 granted patent·1 pending application·0 citations·filing 2014–2015
5Inventor score
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0144US9970108B2Systems and methods for vapor delivery in a substrate processing systemLAM RES CORP·Filed 2015·Granted May 15, 2018·0 cites·19 claims
- 0244US2015380278A1Hardware for the separation and degassing of dissolved gases in semiconductor precursor chemicalsLAM RES CORP·Filed 2014·Application pending·0 cites
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