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Inventor
BEYNET JULIEN
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “BEYNET JULIEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM GENITECH KOREA LTD
1 patent
USRE47170E
Dec 18, 2018
Method of forming semiconductor patterns
ASM GENITECH KOREA LTD
441 citations
98
ASM IP HOLDING BV
1 patent
US9023737B2
May 5, 2015
Method for forming conformal, homogeneous dielectric film by cyclic deposition and heat treatment
ASM IP HOLDING BV
544 citations
98
BEYNET JULIEN
1 patent
US8252691B2
Aug 28, 2012
Method of forming semiconductor patterns
BEYNET JULIEN
519 citations
96