P

Inventor

SCHAEFER FRANK

DE55 patents
⚠️ This page may combine multiple inventors who share the name “SCHAEFER FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BOSCH GMBH ROBERT

25 patents
US7037438B2May 2, 2006

Method for production of a semiconductor component and a semiconductor component produced by said method

BOSCH GMBH ROBERT18 citations93
US6803637B2Oct 12, 2004

Micromechanical component with different doping types so that one type is anodized into porous silicon

BOSCH GMBH ROBERT37 citations93
US7354786B2Apr 8, 2008

Sensor element with trenched cavity

BOSCH GMBH ROBERT27 citations91
US7479232B2Jan 20, 2009

Method for producing a semiconductor component and a semiconductor component produced according to the method

BOSCH GMBH ROBERT8 citations84
US7300854B2Nov 27, 2007

Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method

BOSCH GMBH ROBERT14 citations84
US7213465B2May 8, 2007

Micromechanical sensor

BOSCH GMBH ROBERT18 citations84
US7193290B2Mar 20, 2007

Semiconductor component and a method for producing the same

BOSCH GMBH ROBERT10 citations84
US7160750B2Jan 9, 2007

Method of producing a semiconductor sensor component

BOSCH GMBH ROBERT10 citations84
US7045382B2May 16, 2006

Method for producing micromechanic sensors and sensors produced by said method

BOSCH GMBH ROBERT17 citations84
US7494839B2Feb 24, 2009

Method for manufacturing a membrane sensor

BOSCH GMBH ROBERT9 citations83
US7306966B2Dec 11, 2007

Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor

BOSCH GMBH ROBERT6 citations74
US6840111B2Jan 11, 2005

Micromechanical component and pressure sensor having a component of this type

BOSCH GMBH ROBERT10 citations74
US6832523B2Dec 21, 2004

Micromechanical component and manufacturing method

BOSCH GMBH ROBERT10 citations74
US6649989B2Nov 18, 2003

Micromechanical diaphragm

BOSCH GMBH ROBERT8 citations74
US6395574B2May 28, 2002

Micromechanical component and appropriate manufacturing method

BOSCH GMBH ROBERT13 citations73
US7343806B2Mar 18, 2008

Pressure sensor featuring pressure loading of the fastening element

BOSCH GMBH ROBERT5 citations63
US7843025B2Nov 30, 2010

Micromechanical semiconductor sensor

BOSCH GMBH ROBERT5 citations62
USRE44995EJul 8, 2014

Method for producing a semiconductor component and a semiconductor component produced according to the method

BOSCH GMBH ROBERT0 citations52
US7679154B2Mar 16, 2010

Method for manufacturing a semiconductor component and a semiconductor component, in particular a diaphragm sensor

BOSCH GMBH ROBERT0 citations52
US7479234B2Jan 20, 2009

Method for producing cavities having optically transparent wall

BOSCH GMBH ROBERT1 citations52
US7419581B2Sep 2, 2008

Method for producing optically transparent regions in a silicon substrate

BOSCH GMBH ROBERT0 citations52
US7404332B2Jul 29, 2008

Micromechanical component and method

BOSCH GMBH ROBERT0 citations52
US7755152B2Jul 13, 2010

Semiconductor component configured as a diaphragm sensor

BOSCH GMBH ROBERT0 citations51
US7569412B2Aug 4, 2009

Method for manufacturing a diaphragm sensor

BOSCH GMBH ROBERT0 citations51
US7572661B2Aug 11, 2009

Method for manufacturing a micromechanical sensor element

BOSCH GMBH ROBERT0 citations40

BASF SE

7 patents

SCHAEFER FRANK

3 patents

QIAGEN GMBH

2 patents

NOVARTIS AG

2 patents

BSH HAUSGERAETE GMBH

2 patents

PARAGON AG

1 patent

BENZEL HUBERT

1 patent

EMG ELEKTRONIK MECHANIK GERATE

1 patent

PRISSOK FRANK

1 patent

HENZE OLIVER STEFFEN

1 patent

SIEMENS AG

1 patent

ECKART GMBH

1 patent

CHEN BIN-ERIC

1 patent

VACUTEC HOCHVAKUUM & PRÄZISIONSTECHNIK GMBH

1 patent

Showing the top 50 of 55 patents by PatentIndex Score.