Inventor
BUSCHE MATTHEW JAMES
US8 patents
Patents
8 patentsUS10460916B2Oct 29, 2019
Real time monitoring with closed loop chucking force control
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US10403534B2Sep 3, 2019
Pixilated cooling, temperature controlled substrate support assembly
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US10879046B2Dec 29, 2020
Substrate support with real time force and film stress control
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US12424413B2Sep 23, 2025
Substrate support with real time force and film stress control
APPLIED MATERIALS INC0 citations61
US11915913B2Feb 27, 2024
Substrate support with real time force and film stress control
APPLIED MATERIALS INC0 citations61
US11676802B2Jun 13, 2023
Substrate support with real time force and film stress control
APPLIED MATERIALS INC0 citations61
US10910238B2Feb 2, 2021
Heater pedestal assembly for wide range temperature control
APPLIED MATERIALS INC0 citations51
US9875923B2Jan 23, 2018
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods
APPLIED MATERIALS INC0 citations51