Inventor

MUSTAFA MUHANNAD

US33 patents

⚠️ This page may combine multiple inventors who share the name “MUSTAFA MUHANNAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MUSTAFA MUHANNAD

APPLIED MATERIALS INC

Gas distribution assembly lid

Gas mixer

Showerhead for ALD precursor delivery

Compression fitting

Process kit for improving edge film thickness uniformity on a substrate

Apparatus for multi-flow precursor dosage

Process kit design for in-chamber heater and wafer rotating mechanism

Process kit for a substrate support

Quick disconnect resistance temperature detector assembly for rotating pedestal

High temperature vacuum seal

High temperature vacuum seal

Valve for varying flow conductance under vacuum

Gimbal assembly for heater pedestal

Process kit for a substrate support

High temperature chemical vapor deposition lid

High temperature chemical vapor deposition lid

Lower edge ring of a process kit for semiconductor substrate processing

Lower edge ring of a process kit for semiconductor substrate processing

Pumping liner for improved flow uniformity

Pumping liner for improved flow uniformity

High conductance variable orifice valve

Self-adjustable variable orifice check valve for back pressure reduction

Centering wafer for processing chamber

Apparatus and methods to prevent particle entry into gas lines

High temperature rotation module for a processing chamber

Apparatus and methods for fine planar non-uniformity improvement

Purge ring for pedestal assembly

Multi-zone showerhead

ALD cycle time reduction using process chamber lid with tunable pumping

ALD cycle time reduction using process chamber lid with tunable pumping

Slip ring for use in rotatable substrate support

Thermal shield for processing chamber

MUSTAFA MUHANNAD

Self-tightening fastening apparatus for vibrating work-parts