P

Inventor

AOYAGI PAUL

US9 patents
⚠️ This page may combine multiple inventors who share the name “AOYAGI PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

4 patents
US9470639B1Oct 18, 2016

Optical metrology with reduced sensitivity to grating anomalies

KLA TENCOR CORP31 citations93
US7375828B1May 20, 2008

Modal method modeling of binary gratings with improved eigenvalue computation

KLA TENCOR CORP9 citations83
US7760358B1Jul 20, 2010

Film measurement

KLA TENCOR CORP7 citations73
US11156548B2Oct 26, 2021

Measurement methodology of advanced nanostructures

KLA TENCOR CORP6 citations69

KLA TENCOR TECH CORP

3 patents
US7362686B1Apr 22, 2008

Film measurement using reflectance computation

KLA TENCOR TECH CORP7 citations72
US7345761B1Mar 18, 2008

Film measurement

KLA TENCOR TECH CORP3 citations61
US7190453B1Mar 13, 2007

Film measurement

KLA TENCOR TECH CORP5 citations61

ILORETA JONATHAN

1 patent
US9127927B2Sep 8, 2015

Techniques for optimized scatterometry

ILORETA JONATHAN5 citations63

BACKUES MARK

1 patent
US10481088B2Nov 19, 2019

Automatic determination of fourier harmonic order for computation of spectral information for diffraction structures

BACKUES MARK0 citations27